Please use this identifier to cite or link to this item: http://dspace2020.uniten.edu.my:8080/handle/123456789/7430
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dc.contributor.authorMd Ralib, A.A.
dc.contributor.authorNurashikin Nordin, A.
dc.contributor.authorSalleh, H.
dc.date.accessioned2018-01-11T09:44:46Z-
dc.date.available2018-01-11T09:44:46Z-
dc.date.issued2010
dc.identifier.urihttp://dspace.uniten.edu.my/jspui/handle/123456789/7430-
dc.description.abstractThe growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The design and simulation of a MEMS piezoelectric cantilever beam with interdigitated electrodes is described. The micro-energy harvester is formed using a silicon substrate, ZnO piezoelectric layer, Pt electrodes and nickel proof mass. Finite element simulation was conducted using CoventorWare© to obtain the device at resonance frequency, output voltage and optimum dimensions. © 2010 EDA Publishing/DTIP.
dc.titleSimulation of a MEMS piezoelectric energy harvester
item.fulltextNo Fulltext-
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Appears in Collections:COE Scholarly Publication
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