Use of H mode in low frequency flat spiralled coil RF inductively coupled plasma source to nitride austenitic steel type AISI 304

Abstract

The capabilities of a low frequency flat spiralled coil rf ICP source to nitride austenitic stainless steel type AISI 304 at high rates and to extremely high surface hardness are investigated. For the purpose of testing the applicability of the plasma source in industry, large surface areas were nitrided and the uniformity of the case hardened layers was examined. Results indicate that the H mode rf ICP device improves on previous methods for the nitriding of stainless steel.