Hamzah, A.A.

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Hamzah, A.A.
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Publications


Results 1-7 of 7 (Search time: 0.0 seconds).

Issue DateTitleAuthor(s)
12008Sputtered encapsulation as wafer level packaging for isolatable MEMS devices: A technique demonstrated on a capacitive accelerometerHamzah, A.A. ; Yunas, J. ; Majlis, B.Y. ; Ahmad, I. 
22008Selection of high strength encapsulant for MEMS devices undergoing high-pressure packagingHamzah, A.A. ; Husaini, Y. ; Majlis, B.Y. ; Ahmad, I. 
32006Modelling of sacrificial spin-on glass (SOG) etching in non-straight microchannels using hydrofluoric acidHamzah, A.A. ; Majlis, B.Y. ; Ahmad, I. 
42007HF etching of sacrificial spin-on glass in straight and junctioned microchannels for MEMS microstructure releaseHamzah, A.A. ; Majlis, B.Y. ; Ahmad, I. 
52006Formation of thick spin-on glass (SOG) sacrificial layer for capacitive accelerometer encapsulationHamzah, A.A. ; Majlis, B.Y. ; Ahmad, I. 
62006Fabrication of platinum membrane on silicon for MEMS microphoneHamzah, A.A. ; Majlis, B.Y. ; Ahmad, I. 
72004Deflection analysis of epitaxially deposited polysilicon encapsulation for MEMS devicesHamzah, A.A. ; Majlis, B.Y. ; Ahmad, I.